Semiconductor Manufacturing

Minimize your risk and protect your semiconductor equipment from voltage sags

Semiconductor factories require high levels of electrical power quality. The sensitivity of equipment, processes and the high value of the products make them vulnerable to voltage sags.

Challenges our Customers Experience before engaging Omniverter

Semiconductor manufacturing is one of the most complex and capital-intensive industries today. Manufacturing a chip consists of thousands of steps. As the technology continues to improve the raw material and components keep getting smaller, the need for tighter process and quality control becomes extremely challenging. These are some of the most common problems identified:

  • Nuisance stopping of electronic equipment.
  • Loss of product.
  • PLC and other control failures as well as sensor data malfunction.
  • Clean room contamination and or cross-contamination.
  • Unscheduled breakdowns of equipment, wafer wire cutters, etc.
  • VFD and pumps failure, nuisance breaker trips.
  • Repair time during a breakdown or stoppages.

Common Power Quality Issues Causing these Problems

Voltage Sag/Dips

Voltage sags are the primary cause of unplanned production stoppages in industry. Causes include electrical network faults due to weather, animals across terminals, traffic accidents, load switching upstream, startup of large loads or transformer energization.

Voltage Transients

A sudden change from the nominal voltage or current may be caused by faults in the network, switching of large loads, load shedding, or switching of capacitor banks upstream in the utility network. Voltage surges also occur but may be less severe.

Momentary Power Interruptions

Momentary power loss is complete loss of voltage on one or more phase conductors between 0.5 cycles and 3 seconds.  The most common forms of power failure are due to utility protection systems, e.g. recloser operations, switching, breaker tripping and equipment failures.

Current & Voltage Harmonic Distortion

The use of non-linear loads is the main cause of harmonic distortion. The injection of harmonic currents results in voltage distortion which may cause electronic equipment failure, increased heat in drives and transformers, unwanted tripping, malfunction of sensitive equipment and controls and failure of imaging and scanning equipment.

Possible Solutions to your Power Quality Problems

The Omniverter approach is to understand your particular issue via data analysis prior to offering a product solution. The following solutions were used individually or in combination in various semiconductor process lines:

Benefits from Solving these Power Quality Issues

Benefits derived from Omniverter solutions:

  • Increased production.
  • Improved equipment utilization.
  • Reduced scrap.
  • Minimize tool downtime and improve equipment availability.
  • Increased equipment and process uptime.
  • Improved accurate and reliable delivery.
  • Improved stringent quality requirements.
  • Minimize scrapping of material and delay in cleanup time.  
  • Improved equipment lifecycle and payback period.
  • Minimize the effect of incorrect reading and malfunction of sensor and imaging equipment.

Technical Details

    Accurate data requires the use of dedicated power quality analyzers. Assessment of the data allows us to identify specific problems and only then do we offer a solution.

Summary of the Power Quality Issues (Based on IEEE 1159:2019)
AVC Technical Paper
AVCRTS Technical Paper
Solar & Wind Technical Paper

Most Frequently Asked Question

What is the purpose of the SEMI F47 standard?

The SEMI F47 specification defines the voltage sag immunity required for semiconductor processing, and automated test equipment.

Semiconductor factories require high levels of  quality power due to the sensitivity of equipment and process controls. Semiconductor processing equipment is especially vulnerable to voltage sags.

A voltage sag is defined as a decrease in voltage magnitude below 90% of nominal, but not a complete interruption. The typical duration is from 3 to 10 cycles or 50 to 167 milliseconds.

Talk to us about your Power Quality issues.

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